Products
Electrostatic Chucks (ESC)
SEMCO Technologies’ eChuck offer smart solutions for the clamping and processing of all types of wafers. With more than 30 years of expertise and know-how, SEMCO Technologies has a team of engineers dedicated to innovation in the field of PVD, CVD, ion implantation, etching, inspection and handling.
SEMCO Technologies, expert in electrostatic chucks
Discover our eChucks
SEMCO Technologies has been designing and manufacturing in France innovative electrostatic chucks (ESC) and heating pedestals for the wafer processing industry since 1992.
SEMCO Technologies provides leading OEMs, Semiconductor Fabs, foundries and laboratories worldwide, directly, or through SEMCO Technologies subsidiaries and service centers.
About our chucks
Technical
Characteristics.
Unique solution integrated in one chuck including clamping BSG gas management heaters and temperature measurement.
Safe and easy handling of semiconductor wafers, flat panel displays, solar cells, etc. Clamping capability of a variety of materials including dielectrics and compounds.
Size
Compatible with substrates from 50-mm to 450-mm diameter.
Process Temperature
Wide operating temperature range between -150°C (-238°F) and +650°C (+1200°F).
Coulombic based technology
For Si and III-V wafers, compatible with non conductive substrates sus as Sapphire, TSV carriers etc.
Electrode Type
Bi-Polar, Multi-Polar.
Heating Elements
Multi zone with integrated temperature measurement
Wafer Contact Surface
Custom Pattern dedicated to customer’s applications.
Products
Our technology
SEMCO Technologies offers reliable solutions for clamping and processing standard, thin and ultra-thin wafers by using proprietary ESC capacitive technology. We also have the ability to manufacture ESC’s that have embedded heaters covering a wide range of temperatures, with perfect homogeneity. SEMCO Technologies offers a complete set of thermal modelling tools for BSG regulation, optimization of thermal transfer and temperature uniformity control with optimized backside particle control.
ESCs
Our expertise.
ESCs are used in various semiconductor processes to hold wafers during processing. ESCs is the single part interfacing the wafer with the tool by creating an electrostatic holding force between the disk and the wafer. ESC and pedestal assemblies are built according to the results of electrical, mechanical and thermal modeling, and on the basis of 100% control through serialization.
Certifications and qualifications
Our certifications
and qualifications.
SEMCO Technologies continously seeks to invest in new manufacturing technologies, research and development and trainings for its teams. We aim at providing the best products and services to our customers and we are commited to meet the highest levels in terms of quality and technicality!
ISO 9001
Project on going – End 2025
COFREND 2
COFREND 2 qualification for leak test calculation
QMOS / CMOS
Employees and equipment QMOS / CMOS certified
ISO 7 Cleanroom
All our products are manufactured in ISO 7 cleanroom
Do you have a question or a project ?
For any additional information, our teams are at your disposal. Do not hesitate to contact us to learn more about our products and services.