Discover the Kemstream range
Advanced vaporizers
Our Vapbox range of advanced vaporizers for Direct Liquid Injection (DLI) are dedicated to all chemical vapor and atomic layer deposition processes (CVD and ALD) machines.
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Products
Discover our vaporizers
Vapbox DLI vaporizers use an innovative and patented injection-vaporization technology. They can handle and vaporize a very wide range of CVD and ALD precursors.
The unique proprietary injection-atomization implemented on Vapbox DLI vaporizers achieves flash vaporization allowing for a very fast response time of the vaporizer.
Advanced vaporizers
VAPBOX Series
All Vapbox DLI vaporizers use KEMSTREAM innovative and proprietary injection head and optimized heat transfers. It allows them to provide unmatched performances based on a very fine pulsed atomization of a pulsed liquid flow mixed with a carrier gas prior to injection inside the vaporizer. Vapbox are available from one to four injection heads and can operate at atmospheric pressure or under vacuum.
Certifications
Our certifications and qualifications
SEMCO Technologies continually trains its personnel, upgrades its equipments and manufacturing tools to meet with the level of requirement expected by its customers.
COFREND 2
COFREND 2 qualification for leak test calculation
QMOS
Employees and equipment QMOS certified
ISO 7 Cleanroom
All our products are manufactured in ISO 7 cleanroom
Features
Technical caracteristics
The co-injection of carrier gas and liquid/solution allows an efficient liquid atomization and good mixing of carrier gas with the liquid.
Process temperature
Up to 300°C maximum
Operation
At atmospheric pressure or under vacuum
Flexibility
Handles a very wide range of chemicals
Message us
For any additional information, our teams are at your disposal. Do not hesitate to contact us to learn more about our products and services.
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